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Ichiko Misumi, Satoshi Gonda, Osamu Sato, Kentaro Sugawara, Kazunori Yoshizaki, Qiangxian Huang, Tomizo Kurosawa, Toshiyuki Takatsuji

DESIGN AND FABRICATION OF NANOMETRIC LATERAL SCALE CONSISTING OF GaAs/InGaP SUPERLATTICE

Michael Balke, Erwin Peiner, Lutz Doering

CANTILEVER STRUCTURES FOR MEASURING MICROSTRUCTURED SURFACES OF MACRO AND MICRO COMPONENTS

Albert Weckenmann, Jörg Hoffmann

CONSTRUCTION AND EVALUATION OF A TRACEABLE METROLOGICAL LONG RANGE SCANNING TUNNELING MICROSCOPE

Albert Weckenmann, Thomas Wiedenhoefer

MODULARIZED MODELING OF MEASUREMENT PROCESSES IN MICRO- AND NANOMETROLOGY FOR MEASUREMENT UNCERTAINTY EVALUATION

R. Füßl, G. Jäger, R. Grünwald, I. Schmidt

A NEW VECTORIAL MODEL FOR THE ESTIMATION OF UNCERTAINTY IN NANO COORDINATE

J. Kundrak, P. H. Osanna, A. Afjehi-Sadat, V. Bana

SURFACE QUALITY OF HARD TURNED BORE HOLES

Michal Wieczorowski, Leszek Rozanski

ROUGHNESS ASPECTS IN THERMAL ANALYSIS OF MACHINE TOOLS

B. Ramamoorthy, P. Priya

ROUGHNESS ESTIMATION OF INCLINED SURFACES USING ARTIFICIAL INTELLIGENCE

A. Nomak Akdogan, M. N. Durakbasa, P. H. Osanna, M. E. Yurci

HIGH PRECISION DETERMINATION AND STATISTICAL EVALUATION OF SURFACE ROUGHNESS ALTERATIONS OF SELECTED MATERIALS

Robert Schmitt, Frank Moenning

ENSURE SUCCESS WITH INLINE-METROLOGY

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