The Development Of Vacuum Measurements Down To Extremely High Vacuum –XHV

Anita Calcatelli

Abstract:

The available measuring devices in the ultra high and extreme high vacuum range with their limitations are presented on the basis of the ultimate attainable pressure. New miniature gauges and calibration devices up now available are shortly reviewed. A complete bibliography is presented.
Keywords:

vacuum, gauge, ionization, desorption, ESD, photocurrent
Download:

IMEKO-TC16-2007-KL-034u.pdf
DOI:

_unreg_tc16-2007.034

Event details:

IMEKO TC:

TC16
Event name:

Cultivating Metrological Knowledge
Title:

3rd Conference on Pressure Measurement (together with 20th TC3 Conference on Measurement of Force, Mass and Torque & 1st TC22 Conference on Vibration Measurement)
Place:

Merida, MEXICO
Time:

27 November 2007 - 01 December 2007