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SURFACE TOPOGRAPHY REPRESENTATION IN PROFILOMETRY

M. Wieczorowski, A. Cellary, J. Chajda
  • Abstract:
    In the paper the authors presented a comparison analysis of three different probes used for surface topography measurement. Skid and skidless stylus probes were used as contact pick-ups, while an optical autofocussing pick-up was applied as a non-contact one. The analysis was performed using several different topography parameters. It showed that a skid causes some relatively small distortions as far as the surface representation is concerned. The optical probe on the other hand proved to be a very difficult measuring tool, particularly for surfaces with steep slopes and sharp edges. Yet even for very smooth surfaces a great attention must be paid while measuring with this kind of pick-up is considered.
  • Keywords:
    surface topography, profilometry, probes
  • DOI:
    _unreg_wc-2000.409

Event details:

  • IMEKO TC:
  • Event name:
    XVI IMEKO World Congress
  • Title:

    Measurement - Supports Science - Improves Technology - Protects Environment ... and Provides Employment - Now and in the Future

  • Place:
    Vienna, AUSTRIA
  • Time:
    25 September 2000 - 28 September 2000