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STEP-GAUGE CALIBRATION USING AN INTERFEROMETRIC COORDINATE MEASURING MACHINE AND THE UNCERTAINTY
Sonko Osawa, Toshiyuki Takatsuji, Tomizo Kurosawa
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Abstract:There are many kinds of geometrical gauges used for calibration of machine tools and coordinate measuring machines (CMMs). A step-gauge is a kind of calibration gauge. It consists of many short gauge blocks and a base bar. Gauge blocks were directly calibrated by an interferometer using method of exact fraction. The method, however, does not apply to the calibration of step-gauges because of their complicated structure. The calibration works are very important missions in national metrology institutes (NMIs). We developed the step-gauge calibration system that consisted of a CMM and an interferometer. We describe the system scheme of a step-gauge calibration system using a conventional CMM combined with an interferometer and the evaluation of the measurement uncertainty. The uncertainty in measurement using this system is about 0.5 µm (k = 2) for 1-meter measurement.
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Keywords:step-gauge calibration, uncertainty, Coordinate measuring machine, traceability
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DOI:_unreg_wc-2003.TC14-033
Event details:
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IMEKO TC:
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Event name:XVII IMEKO World Congress
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Title:
Metrology in the 3rd Millennium
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Place:Dubrovnik, CROATIA
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Time:22 June 2003 - 28 June 2003