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Static Characterization of the X-Hall Current Sensor in BCD10 Technology

Gian Piero Gibiino, Marco Crescentini, Marco Marchesi, Marco Cogliati, Aldo Romani, Pier Andrea Traverso
  • Abstract:
    This work presents on-wafer characterization measurements of the X-Hall current sensor architecture implemented in 90-nm BCD10 silicon process by STMicroelectronics. With respect to a previous implementation, technological improvements in terms of active region, isolation layers, and metal stack configuration result in a substantially improved sensitivity. In addition, it is reported that the sensitivity can be further improved by applying a negative voltage to the depletion layer.
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  • DOI:
    tc4-2022.58

Event details:

  • IMEKO TC:
    TC4
  • Event name:
    TC4 Symposium 2022
  • Title:

    25th IMEKO TC4 Symposium and 23nd International Workshop on ADC and DAC Modelling and Testing (IWADC)

  • Place:
    Brescia, ITALY
  • Time:
    12 September 2022 - 14 September 2022