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SPECTRAL INTERFEROMETRY WITH LATERAL CHROMATIC ENCODING

Marc Gronle,Wolfram Lyda,Florian Mauch,Wolfgang Osten, David Fleischle
  • Abstract:
    In this paper, a new single-shot line sensor based on Fourier-domain spectral interferometry is presented. Each point of the sampled line is encoded by a different wavelength obtained by a chromatic dispersion at a grating. The requested height profile of the line is determined by combining a phase detection algorithm with an appropriate model-based approach. The robustness of this algorithm with respect to errors in the initial condition is analyzed before the final presentation of a measurement result.
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  • DOI:
    _unreg_tc14-2011.12

Event details:

  • IMEKO TC:
    TC14
  • Event name:
    TC14 LMPMI Symposium 2011
  • Title:

    10th Symposium on Laser Metrology for Precision Measurement and Inspection in Industry

  • Place:
    Braunschweig, GERMANY
  • Time:
    12 September 2011 - 14 September 2011