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SELF-CALIBRATION FOR OPTICAL PATH LENGTH OF 3D NANOPROFILER CONSIDERING RANDOM ERROR

Ryota Kudo, Kohei Okuda, Kenya Okita, Yusuke Tokuta, Shun Nakatani, Motohiro Nakano, Kazuya Yamamura, Katsuyoshi Endo
  • Abstract:
    In 3D nanoprofiler we develop, the optical path length is the largest uncertainty factor. As a method for self-calibration of the optical path length, we propose a method of utilizing a known optical path length shift. Results of simulation considering the random error, the accuracy was found to be dependent on 3 parameters. Similar characteristics is confirmed by experiment. Optical path length has been determined by the order of under four digits.
  • Keywords:
    nanoprofiler, self-calibration, optical path length, direct measurement, free-form
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  • DOI:
    _unreg_wc-2015.296

Event details:

  • IMEKO TC:
  • Event name:
    XXI IMEKO World Congress
  • Title:

    Measurement in Research and Industry

  • Place:
    Prague, CZECH REPUBLIC
  • Time:
    30 August 2015 - 04 September 2015