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PROGRAMABLE SYSTEM FOR LOW FREQUENCY NOISE MEASUREMENTS IN MICROELECTRONICS DEVICES CONTACTED BY POINT PROBES

Arkadiusz Szewczyk, Ludwik Spiralski, Gérard Ghibaudo, Gilles Reimbold, J. A. Chroboczek
  • Abstract:
    A novel system for low frequency noise, LFN, wafer-level (point probe) measurements and a method of the system calibration with the thermal noise of resistances are discussed. We also present some LFN data on MOSFETs as an example of implementing the LFN measurement technique for the device quality diagnostics.
  • Keywords:
    Noise measurements, MOSFET
  • Download:
  • DOI:
    _unreg_wc-2003.TC4-052

Event details:

  • IMEKO TC:
  • Event name:
    XVII IMEKO World Congress
  • Title:

    Metrology in the 3rd Millennium

  • Place:
    Dubrovnik, CROATIA
  • Time:
    22 June 2003 - 28 June 2003