PRIMARY VACUUM STANDARD CMI FOR UHV PRESSURE RANGE 1 × 10^-6 TO 1 × 10^-10 Pa

• Abstract:

  A primary vacuum standard for UHV pressure range is under development in Czech Metrology Institute (CMI). In order to cover the UHV range down to the limit 1 × 10^-10 Pa a method of calibration in non-equilibrium gas (so called dynamic extension method) was employed. The apparatus is divided into three parts: the dynamic extension stage, the orifice flow standard and the flowmeter. The dynamic extension stage is designed as an XHV apparatus manufactured from a low outgassing rate material – beryllium copper alloy. A special 4 K bakeable refrigerator cryopump is used as the main pump.
• Keywords:

  primary vacuum standard, vacuum gauge calibration in UHV range
• Download:

  IMEKO-WC-2012-TC16-P4.pdf
• DOI:

  _unreg_wc-2012.TC16-P4

Event details: