PRESSURE SENSOR WITH SI₃N₄ DIAPHRAGM AND OPTOELECTRONIC SENSING

• Abstract:

  Sensitive pressure sensor with nitride membrane and optoelectronic read-out system is described. Measured pressure is transformed into thick layer nitride membrane deflection. Nitride membrane serves as a mirror for laser beam and can move reflected laser mark. Mark’s position is sensed using position sensing device – fotolateral diode. Diode double current signal is amplified and conditioned digitally by ADuC 812 microcomputer. This one chip microcomputer provides an IEEE 1451.2 interface.
• Keywords:

  pressure, nitride membrane, optoelectronic, standard IEEE 1451
• Download:

  IMEKO-TC4-2001-065.pdf
• DOI:

  _unreg_tc4-2001.065

Event details:

• IMEKO TC:

  TC4
• Event name:

  TC4 Symposium 2001
• Title:

  11th IMEKO TC4 Symposium on Trends in Electrical Measurements and Instrumentation (together with 6th IMEKO TC4 Workshop on ADC Modelling and Testing)

• Place:

  Lisbon, PORTUGAL
• Time:

  13 September 2001 - 14 September 2001