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Pico-Meter Metrology for the Primary Vibration Calibration

Wan-Sup Cheung, Kyungmin Baik
  • Abstract:
    This paper introduces the use of a homodyne differential plane mirror interferometer (HDPMI) for development of the primary vibration calibration system. The zero-drift test results showed that it enables displacement measurement in a scale of 10 pico-meters could be feasible. The HDPMI model was shown to be quite successful for the primary vibration calibration even in the frequency range of 5 kHz to 20 kHz. The standard uncertainty of the complex sensitivities from 5 kHz to 20 kHz was to be less than 0.46 % for their moduli and 0.57° for the phase shifts.
  • Keywords:
    vibration, primary calibration, laser interferometer, pico-meter metrology
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  • DOI:
    _unreg_tc22-2017.005

Event details:

  • IMEKO TC:
    TC22
  • Event name:
    TC22 Conference 2017 - Measurement facing new challenges!
  • Title:

    4th Conference on Vibration Measurement (together with 23rd TC3 Conference on the Measurement of Force, Mass and Torque and 13th TC5 Conference on the Measurement of Hardness)

  • Place:
    Helsinki, FINLAND
  • Time:
    30 May 2017 - 01 June 2017