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MODULARIZED MODELING OF MEASUREMENT PROCESSES IN MICRO- AND NANOMETROLOGY FOR MEASUREMENT UNCERTAINTY EVALUATION

Albert Weckenmann, Thomas Wiedenhoefer
  • Abstract:
    Measurement uncertainty characterizes the quality of a measurement result. It is determined according GUM by modeling the measurement process with all effective influences. Compared to conventional measurement processes detailed models in micro- and nanometrology are not yet sufficiently published due to ongoing research on influences and correlations. In the paper the modeling background according GUM is shown and research results and a demo application in modularization of measurement processes in micro and nanotechnology will be presented.
  • Keywords:
    metrology, uncertainty, modeling
  • Download:
  • DOI:
    _unreg_wc-2006.TC14-035

Event details:

  • IMEKO TC:
  • Event name:
    XVIII IMEKO World Congress
  • Title:

    Metrology for a Sustainable Development

  • Place:
    Rio de Janeiro, BRAZIL
  • Time:
    17 September 2006 - 22 September 2006