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MINUTE FORM MEASURING SYSTEM
Kazuhiro Ishizu, Akihito Takahashi, Tomoyuki Miyazaki, Kentaro Nemoto
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Abstract:According to the progress of industrial products, high-accuracy and minute parts are increasing rapidly. As one of the desired measuring systems for accurately and efficiently evaluating the 3D form of these mass-production minute form parts, an evaluation system constructed by combining "a high-accuracy stage", "minute probes" and "an optical unit" is described.
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Keywords:Measuring instrument, Minute form measurement, Probe, Low measuring force
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DOI:_unreg_wc-2006.TC14-027
Event details:
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IMEKO TC:
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Event name:XVIII IMEKO World Congress
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Title:
Metrology for a Sustainable Development
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Place:Rio de Janeiro, BRAZIL
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Time:17 September 2006 - 22 September 2006