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MICROMACHINED SEMICONDUCTOR FLOW SENSOR

F. Kohl, R. Fasching, A. Glaninger, R. Chabicovsky, A. Jachimowicz, G. Urban
  • Abstract:
    Miniaturized flow sensors based on thin film germanium thermistors offer high flow sensitivities and short response times. The thermistors are placed on a silicon nitride diaphragm carried by a silicon frame. Using the controlled overtemperature scheme the measurable airflow velocity ranges from 0.001 m/s to 200 m/s. The response time to large step changes of the air velocity is less than 20 ms. Our experiments show that the sensor is also applicable to acoustic flow measurements.
  • Keywords:
    electrocalorimetric flow measurement, thin film germanium thermistors, micromachined flow sensor
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  • DOI:
    _unreg_wc-2000.238

Event details:

  • IMEKO TC:
  • Event name:
    XVI IMEKO World Congress
  • Title:

    Measurement - Supports Science - Improves Technology - Protects Environment ... and Provides Employment - Now and in the Future

  • Place:
    Vienna, AUSTRIA
  • Time:
    25 September 2000 - 28 September 2000