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METROLOGICAL PERFORMANCE OF INTEGRATED MULTIPLE AXIS MEMS ACCELEROMETERS UNDER THERMAL EFFECT

Tamara G. Nesterenko, Evgeniy S. Barbin, Aleksey N. Koleda, Alisa A. Arshinova
  • Abstract:
    Microelectromechanical system (MEMS) accelerometers are widely used for the measurement of acceleration, tilt, vibration, and shock in moving objects. MEMS-based accelerometers are rather sensitive to the temperature changes. The paper presents the dependence between the temperature changes and metrological performance of MEMS-based accelerometer. Methods of the temperature compensation are considered in this paper.
  • Keywords:
    MEMS-based accelerometer, thermal errors, moving mass, temperature sensitivity, elastic suspension
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  • DOI:
    _unreg_wc-2015.435

Event details:

  • IMEKO TC:
  • Event name:
    XXI IMEKO World Congress
  • Title:

    Measurement in Research and Industry

  • Place:
    Prague, CZECH REPUBLIC
  • Time:
    30 August 2015 - 04 September 2015