LASER TRAPPING MICRO-PROBE FOR NANO-CMM

• Abstract:

  Nano-CMM is required to evaluate tolerance and dimension of the component parts of micromachines by coordinate measurement of submillimeters size 3-D shapes. This paper discusses a micro-probe technique for the nano-CMM, the so-called laser trapping micro-probe. The principle to detect a three dimensional position is based on the nature of an optically trapped particle and interferometer method. An optically trapped silica particle in air is used as a micro-probe sphere. Practical positional detection method is established based on experimental analysis of fringe intensity changes while a probe sphere is approaching to a workpiece. Measurements of a glass microsphere used as particle size standards is demonstrated to verify the validity of the laser trapping micro-probe. Measurement results show that the laser trapping probe has a possibility to measure submillimeters size 3-D shapes of such as microparts.
• Keywords:

  microparts, laser trapping, nano-CMM probe
• Download:

  IMEKO-WC-2000-TC2-P045.pdf
• DOI:

  _unreg_wc-2000.045

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