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IMPROVEMENT OF MEASUREMENT ACCURACY BY COMBINED EVALUATION OF CMM AND TRACKING INTERFEROMETER MEASUREMENTS

Frank Härtig, Christian Keck, Karin Kniel, Heinrich Schwenke, Franz Wäldele, Klaus Wendt
  • Abstract:
    This paper presents a novel approach to improve the accuracy of coordinate measuring machines (CMM) by integrating a single high precision tracking interferometer (TI) as an additional measurement axis. Improved positions are obtained by a combination of the CMM positions as read from the scales and the distances produced by the TI. Monte-Carlo simulations of length and flatness measurements show that the uncertainties can be reduced considerably by an appropriate configuration. First measurements confirm the results of preliminary simulations.
  • Keywords:
    Co-ordinate measuring machines, Tracking interferometer, Dimensional measurements
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  • DOI:
    _unreg_wc-2003.TC7-029

Event details:

  • IMEKO TC:
  • Event name:
    XVII IMEKO World Congress
  • Title:

    Metrology in the 3rd Millennium

  • Place:
    Dubrovnik, CROATIA
  • Time:
    22 June 2003 - 28 June 2003