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HYBRID TYPE SURFACE THERMOMETER

Tohru Iuchi, Kensuke Hiraka
  • Abstract:
    A hybrid-type surface thermometer combines the contact and non-contact methods, which allows us to overcome the shortcomings of both methods. The hybridtype surface thermometer is a modified radiation thermometer. Temperature measurement using this thermometer is possible within a random error of ±0.5 K at temperatures of around 1000 K. This thermometer provides a useful means for calibration of in-situ temperature measurement in various processes, especially in the semiconductor industry. This paper introduces the basic idea of the hybrid-type surface thermometer, presents experimental results and discussions, and finally describes an application.
  • Keywords:
    radiation thermometry, thermal contact resistance, metal film, emissivity, semiconductor wafer
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  • DOI:
    _unreg_wc-2006.TC12-007

Event details:

  • IMEKO TC:
  • Event name:
    XVIII IMEKO World Congress
  • Title:

    Metrology for a Sustainable Development

  • Place:
    Rio de Janeiro, BRAZIL
  • Time:
    17 September 2006 - 22 September 2006