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EVALUATION OF CUTTING DEVICE WITH STROKE ENLARGEMNET MECHANISM
Yoshitaka Morimoto
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Abstract:A new cutting device driven by an enlargement mechanism with a PZT drive has been developed to realize positioning the cutting tool from nm to mm. In this study, the mechanical principal of a newly developed enlargement mechanism consisting of fluid chamber, a PZT device, and cutting tool stage is reported. The basic performances of the developed mechanism are also evaluated. This developed device demonstrates that the magnitude of enlargement reaches 4 times of stroke than the original one of the PZT. The dynamic characteristics show DC to 50 Hz which is enough frequency response to realize the non-circle cutting. The non-circle profile is machined by the developed mechanism. The profile accuracy obtained settles in ±1.3 µm by the repetitive control method.
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Keywords:PZT enlargement mechanism, thrust force, positioning accuracy
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DOI:_unreg_wc-2009.108
Event details:
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IMEKO TC:
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Event name:XIX IMEKO World Congress
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Title:
Fundamental and Applied Metrology
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Place:Lisbon, PORTUGAL
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Time:06 September 2009 - 11 September 2009