ENHANCED MEASUREMENT OF HIGH ASPECT RATIO SURFACES BY APPLIED SENSOR TILTING

• Abstract:

  During tactile surface measurements the contact point between probing tip and surface varies depending on the local surface angle. To reduce the resulting measurement deviation on high slopes a probing principle is investigated that applies a dynamic surface dependent sensor tilt. This probing process and the logics for the angle determination have been simulative evaluated. A test stand based on a nanometer coordinate measuring machine is developed and fitted with a rotation kinematic based on stacked rotary axes. Systematic positioning deviations of the kinematic are reduced by a compensation field. The test stand has been completed and results are presented.
• Keywords:

  profilometry, servo system, uncertainty, simulation
• Download:

  IMEKO-WC-2012-SS2-O1.pdf
• DOI:

  _unreg_wc-2012.SS2-O1

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