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Electromechanical characterizations of MEMS based energy harvesters by harmonic sampling analysis method

Alexandre Bounouh, Denis Bélières
  • Abstract:
    This paper presents a new and accurate experimental method based on electrical harmonic distortion analysis to determine mechanical characteristics (resonant frequency) of MEMS devices used in widespread applications as in energy scavenging, cantilever-based microsystems for gas sensing and atomic force microscopy or in any kind of MEMS resonators. Resonant frequencies ranging from 0.8 kHz to 5 kHz of electrostatic actuated MEMS-based harvesters have been measured by this technique with an uncertainty as low as a few parts in 103 constituting an outstanding result compared to the other methods.
  • Keywords:
    MEMS, resonant frequency, damping factor, Distortion analysis, sampling measurement
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  • DOI:
    _unreg_tc4-2013.047

Event details:

  • IMEKO TC:
    TC4
  • Event name:
    TC4 Symposium 2013
  • Title:
    19th IMEKO TC4 Symposium Measurements of Electrical Quantities (together with 17th TC4 IWADC Workshop on ADC and DAC Modelling and Testing)
  • Place:
    Barcelona, SPAIN
  • Time:
    18 July 2013 - 19 July 2013