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DISPLACEMENT MEASURING SENSOR CALIBRATION USING NONLINEARITY FREE LASER INTERFEROMETER

TaeBong Eom, JaeWan Kim
  • Abstract:
    For calibration of displacement measuring sensors with sub-nanometer resolution, a novel calibration system using laser interferometer was developed. It is directly traceably to the Meter and portable due to use of laser coupled by an optical fiber. And also it has a higher accuracy because of nonlinearity free laser interferometer and compact design. The detailed system and one example of calibration are described. Finally a detailed uncertainty budget is described.
  • Keywords:
    nanosensor, nonlinearity, laser interferometer
  • Download:
  • DOI:
    _unreg_wc-2003.TC14-028

Event details:

  • IMEKO TC:
  • Event name:
    XVII IMEKO World Congress
  • Title:

    Metrology in the 3rd Millennium

  • Place:
    Dubrovnik, CROATIA
  • Time:
    22 June 2003 - 28 June 2003