DIFFUSION VIALS FOR LOW AND ACCURATE RELEASE OF KEY-VOC IN ATMOSPHERIC CHEMISTRY AND CLEAN ROOM INDUSTRIES

• Abstract:

  Accurate VOC mixtures at ppb level are needed both for the atmospheric monitoring both for the clean room industries. Research is developing a compact diffusion generator of trace mixtures to be installed on-site. To assure the required accuracy, vials with a low and calibrated diffusion rate DR are necessary. In this paper glass vials were realized, the uncertainty budget of DR was evaluated and experimentally validated. A DR accuracy better than 3% at 200 ng/min release rate was obtained.
• Keywords:

  Key-VOC, AMCs, reference gas mixtures, diffusion rate, uncertainty
• Download:

  IMEKO-WC-2015-TC24-459.pdf
• DOI:

  _unreg_wc-2015.459

Event details: