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DEVELOPMENT OF A LOW–COST MEASUREMENT SYSTEM FOR CUTTING EDGE PROFILE DETECTION

Gregor Gerstorfer, Bernhard G. Zagar
  • Abstract:
    This paper describes the use of a CD pickup head as a displacement measurement system. First, the components contained in a pickup head are explained and how they are combined to obtain the functionality of a pickup head. Afterwards, the application of measuring a knife edge profile is introduced.The results revealed some insuffiencies with the current system. Nevertheless, the cutting edge’s radius of curvature can be estimated.
  • Keywords:
    optical pickup head, CD, profile measurement.
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  • DOI:
    _unreg_tc2-2015.06

Event details:

  • IMEKO TC:
    TC2
  • Event name:
    TC2 Symposium 2010
  • Title:
    19th Symposium on Photonic Measurements
  • Place:
    Hangzhou, CHINA
  • Time:
    11 September 2010 - 13 September 2010