DESIGN, FABRICATION AND ELECTROMECHANICAL CHARACTERISTICS OF A MEMS BASED MICROMIRROR

• Abstract:

  In this paper the design, fabrication and electromechanical characteristics of a electrostatic torsional micromirror is presented. In addition to that the static characteristics of a micro-mirror based on the parallel-plate capacitor model are described.
• Keywords:

  MEMS, Micro-mirror, Snap-down
• Download:

  IMEKO-WC-2009-TC3-028.pdf
• DOI:

  _unreg_wc-2009.028

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