Skip to main content

Search Proceedings

DESIGN AND FABRICATION OF NANOMETRIC LATERAL SCALE CONSISTING OF GaAs/InGaP SUPERLATTICE

Ichiko Misumi, Satoshi Gonda, Osamu Sato, Kentaro Sugawara, Kazunori Yoshizaki, Qiangxian Huang, Tomizo Kurosawa, Toshiyuki Takatsuji
  • Abstract:
    Nanometric lateral scales with 25 nm pitch using GaAs/InGaP superlattice were designed and fabricated for realization of the-smallest-pitch-CRMs. The pitch of the scales was measured by a nanometrological AFM and uncertainty in pitch measurements was evaluated. The quality of the developed scales as CRMs was verified.
  • Keywords:
    nanometrology, pitch, CRM
  • Download:
  • DOI:
    _unreg_wc-2006.TC14-031

Event details:

  • IMEKO TC:
  • Event name:
    XVIII IMEKO World Congress
  • Title:

    Metrology for a Sustainable Development

  • Place:
    Rio de Janeiro, BRAZIL
  • Time:
    17 September 2006 - 22 September 2006