CONTACTLESS DIAGNOSTICS OF THIN FILM LAYERS

• Abstract:

  Thin layer resistance measurement using the change of complex coil impedance is a contact-less method for conductive layer diagnostics. The analysed sample is inserted into the leakage field of the coil. Our conclusions of a theoretic analysis have been verified in experimental arrangement with a measuring coil and a vector impedance meter. The layer sheet resistance is evaluated by electronic system. A special algorithm, ensuring the explicit evaluation of the measuring, is used for determination of the layer sheet resistance.
• Keywords:

  thin film diagnostics
• Download:

  IMEKO-WC-2009-TC10-371.pdf
• DOI:

  _unreg_wc-2009.371

Event details: