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COMPARISON OF MILLIGRAM SCALE DEADWEIGHT FORCES TO ELECTROSTATIC FORCES

Sheng-Jui Chen, Sheau-Shi Pan and Yi-Ching Lin
  • Abstract:
    This paper presents a comparison of milligram scale deadweight forces to electrostatic forces that is generated from an electrostatic sensing & actuating force measurement system recently built in Center for Measurement Standards, Industrial Technology Research Institute (CMS/ITRI). In the first section, we briefly introduce the electrostatic sensing and actuating force measurement system, and then we describe the experimental setup for the comparison and the results. Finally, we give a discussion and outlook.
  • Keywords:
    deadweight force, electrostatic force, electrostatic actuation, capacitive position sensing, force balance
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  • DOI:
    _unreg_wc-2012.TC3-O29

Event details:

  • IMEKO TC:
  • Event name:
    XX IMEKO World Congress
  • Title:

    Metrology for Green Growth

  • Place:
    Busan, REPUBLIC of KOREA
  • Time:
    09 September 2012 - 12 September 2012