COMPARISON OF A SCANNING INTERFEROMETRIC PROFILE MEASUREMENT METHOD AND AN ULTRA-PRECISE COORDINATE MEASURING MACHINE

A. Wiegmann, M. Schulz, K. Yoshizumi, K. Kubo, D. Ramm

Abstract:

Comparative profile measurements of a testspecimen with a diameter of 150 mm and a peak-to-valley height of 50 µm carried out by an ultra-precise coordinate measuring machine (Panasonic UA3P) and a highly accurate scanning interferometric multi-sensor instrument (ETMS) are presented. The instruments and their principles are described. Although the measurement principles of the instruments are different, the measurements agree within the claimed uncertainties. The rms-difference of the measurement results is less than 20 nm.
Keywords:
Download:

IMEKO-TC14-2011-15.pdf
DOI:

_unreg_tc14-2011.15

Event details:

IMEKO TC:

TC14
Event name:

TC14 LMPMI Symposium 2011
Title:

10th Symposium on Laser Metrology for Precision Measurement and Inspection in Industry
Place:

Braunschweig, GERMANY
Time:

12 September 2011 - 14 September 2011