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CANTILEVER STRUCTURES FOR MEASURING MICROSTRUCTURED SURFACES OF MACRO AND MICRO COMPONENTS

Michael Balke, Erwin Peiner, Lutz Doering
  • Abstract:
    In this paper we present a new type of silicon micro cantilever structures with integrated tips for measuring microstructured surfaces. Results of FEM simulation and calibration results will be discussed. Also the fabrication of the structures and the fabrication of the tips are described.
  • Keywords:
    cantilever, silicon bulk micromachining, piezoresistive strain gauge
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  • DOI:
    _unreg_wc-2006.TC14-032

Event details:

  • IMEKO TC:
  • Event name:
    XVIII IMEKO World Congress
  • Title:

    Metrology for a Sustainable Development

  • Place:
    Rio de Janeiro, BRAZIL
  • Time:
    17 September 2006 - 22 September 2006