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CALIBRATION OF LOW-FORCE STYLUS PROBES

Lutz Doering, Erwin Peiner, Michael Balke, Uwe Brand
  • Abstract:
    Traceable measurement of micro forces involved during stylus profiling is described. For this purpose two methods based on a transferable cantilever-type force standard were developed using the cantilever deflection and the output voltage of an integrated piezoresistive strain gauge. Force calibration was performed with commercial stylus instruments in the range of 10 - 200 µN.
  • Keywords:
    micro force calibration standard, stiffness artefact, load cell, stylus instrument
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  • DOI:
    _unreg_wc-2006.TC3-053

Event details:

  • IMEKO TC:
  • Event name:
    XVIII IMEKO World Congress
  • Title:

    Metrology for a Sustainable Development

  • Place:
    Rio de Janeiro, BRAZIL
  • Time:
    17 September 2006 - 22 September 2006