AN OPTICAL CALIBRATION METHOD FOR A DOUBLE-SLIT INTERFEROMETER CAPABLE OF INSPECTING THICKNESS VARIATION OF MOVING GLASS PANELS

• Abstract:

  A double-slit interferometer capable of inspecting thickness variation of a moving glass panel with nanometric resolution, and its calibration method using a partly electrode-coated nematic liquid crystal cell are presented.
• Keywords:

  double-slit, interferometer, thickness variation, calibration, liquid crystal
• Download:

  IMEKO-WC-2015-TC14-295.pdf
• DOI:

  _unreg_wc-2015.295

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