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A SILICON FLOW SENSOR FOR HIGHLY ACCURATE MASS FLOW MEASUREMENT

Michel J. A. M. van Putten, Pascal F. A. M. van Putten
  • Abstract:
    We describe a thermal, silicon integrated, mass flow sensor for highly accurate mass flow measurements over a large dynamic range. Offset-drift is completely eliminated by application of the VanPutten-ADM method. The method is illustrated using air. The total measurement uncertainty is typically < 1% of reading, with a turndown larger than 1:1000.
  • Keywords:
    thermal, silicon flow sensor, VanPutten-ADM
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  • DOI:
    _unreg_tc9-2000.094

Event details:

  • IMEKO TC:
    TC9
  • Event name:
    FLOMEKO 2000
  • Title:
    10th Conference on Flow Measurement
  • Place:
    Salvador, Bahia, BRAZIL
  • Time:
    04 June 2000 - 08 June 2000