A NEW VECTORIAL MODEL FOR THE ESTIMATION OF UNCERTAINTY IN NANO COORDINATE

• Abstract:

  Nano coordinate measuring machines (NCMMs) are technological devices enabling the positioning, touching and measuring of centimetre-sized objects with nanometre precision. When using such measuring machines the specification of measurement results requires the expression of uncertainty of measurement. This paper describes a concept for the expression of three- dimensional uncertainty of NCMMs based on a vectorial metrological model. By means of a modular model approach submodels can be easily included in the metrological main model. Furthermore, cross-coupling effects arising between the measuring axes can be taken into account. The described model provides a basis for the expression of uncertainty according to the Guide to the Expression of Uncertainty in Measurement (GUM) or by means of the Monte- Carlo-Method. The results of the uncertainty analysis are shown for a special example of a vectorial model.
• Keywords:

  Nanometrology, uncertainty of nano coordinate measuring machines, vectorial metrological model
• Download:

  PWC-2006-TC14-034u.pdf
• DOI:

  _unreg_wc-2006.TC14-034

Event details: