A NEW APPROACH TO IN-SITU FORMTEST-INTERFEROMETRY

• Abstract:

  Interferometry is a common method for testing the form of ultra-precise components. However interferometrical measurements are very sensitive to external influences. Due to this reason, in-situ measurements are very difficult to perform, especially in the vicinity of production processes. In this paper we present a new concept for the integration of interferometers in a machine tool and first results of the analysis of fundamental influences on interferometers operated in-situ.
• Keywords:

  interferometry, in-situ measurement, simulation
• Download:

  PWC-2003-TC2-017.pdf
• DOI:

  _unreg_wc-2003.TC2-017

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