A FLEXIBLE THREE-AXIAL FORCE MEASURING ARRAY FOR TACTILE SENSING APPLICATIONS

• Abstract:

  We report a high-performance flexible tactile sensor capable of measuring 3-axial forces, which consists of an array with a size of 8 × 8 integrated in an area of 10 mm². Each cell has four strain gauges to detect 3-axial forces. The strain gauge is made of an inorganic silicon membrane. We fabricated the tactile sensor through a combination of a conventional batch micromachining process and a dry-transfer-printing technique. The fabricated tactile sensor showed a repeatable error less than 1 %, a minimum detectable force better than 0.5 g and a minimal crosstalk among 3-axial forces.
• Keywords:

  force sensor, array, tactile sensor, flexible, 3-axis
• Download:

  IMEKO-WC-2015-TC3-049.pdf
• DOI:

  _unreg_wc-2015.049

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