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THERMOPOWER MEASUREMENT OF SINGLE NANOWIRE USING A MEMS DEVICE
Ho Sun Shin,Joon Sung Lee,Seong Gi Jeon,Jin Yu, Jae Yong Song
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Abstract:We have fabricated a MEMS device on suspended silicon nitride in order to measure the thermoelectric properties of single nanowire. The temperature gradient was generated by a nanoheater and the temperatures of thermometers were calibrated and measured. Seebeck coefficient and electrical conductivity of single Bi2Te3 nanowire with a 70 nm-diameter were measured in the temperature range of 50 K to 400 K. Based on the simulation results of the temperature distribution over the MEMS structure, the method of calibrating the temperature and measurement uncertainty are discussed.
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Keywords:nanowire, MEMS, thermal simulation, thermopower
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Download:
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DOI:_unreg_wc-2012.SS2-O8
Event details:
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IMEKO TC:
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Event name:XX IMEKO World Congress
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Title:
Metrology for Green Growth
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Place:Busan, REPUBLIC of KOREA
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Time:9 September 2012 - 12 September 2012