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THERMO-MECHANICAL MATERIAL CHARACTERIZATION OF PHTOTORESISTS WITH HIGH ASPECT RATIO
J. Vogel, H.-J. Feige, J. Saupe, G. Grützner, J. Grimm
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Abstract:MEMS made of photosensitive polymers offer new functionalities and applications in the micro world. Additionally to the new materials and advanced technologies the analysis of the thermo-mechanical material properties is required to ensure reliability and lifetime. Under this point of view, an uniaxial micro tensile measuring system has been developed to determine stress-strain-curves, Young’s modulus or Poisson’s ratio. The results will be shortly compared with those of Dynamic-Mechanical Analysis (DMA).
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Keywords:photosensitive polymers, material properties, microtensile test by DIC, DMA
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Download:
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DOI:_unreg_tc15-2014.031
Event details:
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IMEKO TC:TC15
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Event name:TC15 Youth Symposium 2014
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Title:
13th Youth Symposium on Experimental Solid Mechanics
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Place:Děčín, CZECH REPUBLIC
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Time:29 June 2014 - 2 July 2014