NEW APPROACH IN INTERFEROMETRIC LENGTH MEASUREMENTS

• Abstract:

  Interferometric length measurements without parallax error, based on the phenomenon of the reproducible wringing, are demonstrated. Using reproducible wringing together with the slave-block technique, accuracy level below 1 nm can be obtained for blocks of a few mm length with small flatness deviation. Phase change correction determination with sub-nm uncertainty is achieved for blocks up to 100 mm. Comparing the results of the double-ended method on a transparent reference plate with the reproducible wringing results, measurements without parallax error can be performed in the general case with a nm uncertainty.
• Keywords:

  meter realization, gauge block, Abbe error, uncertainty, interferometry
• Download:

  IMEKO-WC-2000-TC14-P406.pdf
• DOI:

  _unreg_wc-2000.406

Event details:

• IMEKO TC:
• Event name:

  XVI IMEKO World Congress
• Title:

  Measurement - Supports Science - Improves Technology - Protects Environment ... and Provides Employment - Now and in the Future

• Place:

  Vienna, AUSTRIA
• Time:

  25 September 2000 - 28 September 2000