National Comparison of Spring Constant Measurements of Atomic Force Microscope Cantilevers

• Abstract:

  This paper illustrates a comparison of spring constant measurements between Technische Universität Ilmenau (TU Ilmenau) and Physikalisch-Technische Bundesanstalt (PTB). For the traceable comparison, an atomic force microscope (AFM) cantilever with a nominal stiffness of 40 N/m was chosen as the transfer artefact. The determined spring constants differ less than 1 %. The measurement uncertainty was = 4 % (k = 2) and hence conforms to the state of the art of AFM cantilever spring constant measurements. The main common uncertainty contribution of TU Ilmenau and PTB is due to the adjustment of the cantilever towards the calibration force.
• Keywords:

  spring constant, force, deformation, cantilever, micro force sensors
• Download:

  IMEKO-TC3-2017-039.pdf
• DOI:

  _unreg_tc3-2017.039

Event details:

• IMEKO TC:

  TC3
• Event name:

  TC3 Conference 2017 - Measurement facing new challenges!
• Title:

  23^rd Conference on the Measurement of Force, Mass and Torque (together with 4^th TC22 Conference on Vibration Measurement and 13^th TC5 Conference on the Measurement of Hardness)

• Place:

  Helsinki, FINLAND
• Time:

  30 May 2017 - 1 June 2017