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FIBER-COUPLED MICROOPTCAL INTERFEROMETRIC SENSOR FOR PRECISION ENGINEERING APPLICATIONS

Peter Lehmann, Markus Schulz
  • Abstract:
    Industrial inspection of precision manufactured mechanical or optical components requires flexible, accurate, fast and reasonably priced optical sensors. We present a combination of interferometric and confocal sensor based on a fiber-coupled micro-optical probe. Owing to its micro-optical realization, its low mass, and the high data rate the probe head of the sensor can be used for very fast surface contour tracking.
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  • DOI:
    _unreg_tc14-2011.03

Event details:

  • IMEKO TC:
    TC14
  • Event name:
    TC14 LMPMI Symposium 2011
  • Title:

    10th Symposium on Laser Metrology for Precision Measurement and Inspection in Industry

  • Place:
    Braunschweig, GERMANY
  • Time:
    12 September 2011 - 14 September 2011