Design of ATE Calibration Device Based on Microelectric Reference Materials

• Abstract:

  Microelectronic Reference materials (RMs) are a good way to achieve microelectronic traceability. To achieve full calibration of Automated Test Equipment(ATE), each test channel should be traced to calibration device of ATE based on RMs. This paper puts forward a design solution of calibration device of ATE based on RMs, which can realize the versatility and portability of calibration device, and realize automatic calibration progress.
• Keywords:

  ATE, calibration, reference materials
• Download:

  IMEKO-TC4-2019-053.pdf
• DOI:

  _unreg_tc4-2019.053

Event details:

• IMEKO TC:

  TC4
• Event name:

  TC4 Symposium 2019
• Title:

  23^rd IMEKO TC4 Symposium

• Place:

  Xi'an, CHINA
• Time:

  17 September 2019 - 20 September 2019