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DEFLECTOMETRIC PROFILER WITH SMALL BEAM SIZE USING A COMMERCIALLY AVAILABLE AUTOCOLLIMATOR

Youichi Bitou, Yohan Kondo
  • Abstract:
    The special resolution of the angle-based deflectometric surface profiler has been improved by introducing a novel null instrument. Proposed null instrument is simple, inexpensive, and has fast response time. High accuracy flatness measurement for low reflective surface has been successfully demonstrated with 1 mm laser beam spot size. The repeatability of the surface form measurement is better than ±0.6 nm.
  • Keywords:
    flatness, metrological instrumentation, surface form measurement, deflectometry, autocollimator
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  • DOI:
    _unreg_tc14-2014.03

Event details:

  • IMEKO TC:
    TC14
  • Event name:
    TC14 LMPMI Symposium 2014
  • Title:

    11th Symposium on Laser Metrology for Precision Measurement and Inspection in Industry

  • Place:
    Tsukuba, JAPAN
  • Time:
    3 September 2014 - 5 September 2014