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ABSOLUTE LENGTH-MEASURING SYSTEM BY AUTOMATIC INTERFERENCE-FRINGE-PEAK DETECTION WITH OPTICAL-COMB FIBER INTERFEROMETER

Hirokazu Matsumoto, Kiyoshi Takamasu
  • Abstract:
    Optical frequency comb has various characteristics such as short pulse, broad spectra, many spectral lines, and high temporal coherency. In this present, new absolute length-measuring technique with a high resolution of 0.1 µm is developed by using temporal-coherence interferometry of optical comb and a short translation stage for various length ranges. A new fiber Fabry-Perot etalon of a free spectral range of a frequency of 15 GHz is developed for improving the fine positioning in space. Moreover, interference-fringe-peak is automatically achieved by developing a new analog electric circuit. One position is measured round several milliseconds depending to the SN ratio of the signal detected for various ranges of the lengths measured.
  • Keywords:
    length/distance measurement, high repetition frequency, optical comb, absolute metrology
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  • DOI:
    _unreg_tc14-2014.19

Event details:

  • IMEKO TC:
    TC14
  • Event name:
    TC14 LMPMI Symposium 2014
  • Title:

    11th Symposium on Laser Metrology for Precision Measurement and Inspection in Industry

  • Place:
    Tsukuba, JAPAN
  • Time:
    3 September 2014 - 5 September 2014